| PARAMETER |
VALUE
|
ASTM Standard |
| Growing method |
CZ
|
|
| Diameter (mm) |
151.5+0.5/-0.5
|
|
| Length (mm) |
150-300
|
|
| Dopant |
p (Boron)
|
F42-93 |
| Orientation |
<1-0-0>
|
F26-87a |
| Misorientation (degree) |
<1°
|
|
| Resistiviy (ohm-cm) |
9.6-14.4
|
F43-99 (central point) |
| Radial gradient of resistivity,
not more than (%) |
8
|
F81-95 (Plan B) |
| Oxygen concentration (cm3) |
(7.5-9.0)1017
|
F1188-93a (Central point) |
| Radial gradient of oxygen distribution,
not more than (%) |
10
|
F951-96 (plan B) |
| Carbon concentration (cm3) |
<3*1016
|
F1391 |
| Lifetime (us) |
48
|
F1535-94 |
| Dislocation density, not more than
(cm2) |
<10
|
F1725-97 |
| Swirls, twins, slip lines |
no
|
|
| Ring distribution of OSF |
no
|
|
